|
MEMS: OPTICAL
SWITCHES
Research being conducted in the field of micro-electromechanical
systems (MEMS) with emphasis in optical switches. An array of mirrors
re-directs light information (from fiber optics) by means of rotating
metallic mirrors actuated by a voltage. These devices can be used
in telecommunications and are used to improve the brightness in
digital projectors. This new technology will replace more costly,
less efficient systems and provide this advantage at the micron-scale.
These devices require silicon processing which consist of photo
lithography, deep reaction ion etching (DRIE), and flip-chip bonding.
Testing includes the use of an optical microscope fitted with a
laser-vibrometer, an optical-profilometer, and a scanning electron
microscope (SEM). Analysis and design is assisted by 3-D modeling
software such as Solidworks and ANSYS 5.7. Currently, the prototype
is exceeding expectations and has shown only a few setbacks. Some
adjustments in bonding techniques and gaining access to better equipment
would most likely improve these inaccuracies. Future research will
hopefully add to the already vast improvements made to the current
designs. Furthermore, the recent application of metals into micro-electromechanical
systems has already started to transform conventional thought and
is on its way to setting the standard for MEMS devices.
View
final presentation as PDF
Return
to Projects Page
|
