|
CHARACTERIZATION
OF ALUMINUM NITRIDE USING SURFACE ACOUSTIC WAVE (SAW) DEVICES
Aluminum Nitride is a piezoelectric material that vibrates when
an AC electric field is applied to it. A specific frequency is dictated
by the material properties and shape given to the film. In this
research project a Surface Acoustic Wave (SAW) device is used as
a tool, which allows one to characterize the acoustic and piezoelectric
properties of Aluminum Nitride. I will be involved with the design
and construction of SAW devices. My goal is to design a SAW device
that will allow the maximum output signal intensity to be achieved.
Lithography and liftoff are the processes that I will use to construct
the SAW devices. The equipment that I use to measure the characteristics
of the SAW device is a Network Analyzer. The overall goal is to
develop UHF filters based on Bulk Acoustic Wave mechanical resonators
on Aluminum Nitride such that their integration with MEMS and electronic
components is possible.
View final presentation
as PDF
Return
to Projects Page
|
